US 12,405,540 B2
Extreme ultraviolet inner pod distributed support
Russ V. Raschke, Chanhassen, MN (US); and Tyler Monforton, Chaska, MN (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Sep. 29, 2023, as Appl. No. 18/375,290.
Claims priority of provisional application 63/411,525, filed on Sep. 29, 2022.
Prior Publication US 2024/0111222 A1, Apr. 4, 2024
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/70741 (2013.01) 20 Claims
OG exemplary drawing
 
1. An apparatus comprising:
an inner container having a baseplate and a cover;
an outer container having a pod dome and a pod door, the pod door having a locked state and an unlocked state; and
a first set of pins and a second set of pins disposed on the pod door, the first set of pins and the second set of pins being configured to support the baseplate,
wherein when the pod door is in the unlocked state and the first set of pins contacts the baseplate, a clearance is formed between the second set of pins and the baseplate,
when the pod door is in the locked state, the first set of pins and the second set of pins contact the baseplate.