US 12,405,481 B2
Apparatus for manufacturing display device
Cheol Ho Park, Yongin-si (KR); Je Kil Ryu, Yongin-si (KR); Young Su Chae, Yongin-si (KR); Akifumi Sangu, Yongin-si (KR); and Hae Sook Lee, Yongin-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Jun. 26, 2024, as Appl. No. 18/754,827.
Claims priority of application No. 10-2023-0170769 (KR), filed on Nov. 30, 2023.
Prior Publication US 2025/0180921 A1, Jun. 5, 2025
Int. Cl. G02B 27/14 (2006.01); B23K 26/352 (2014.01); B23K 26/70 (2014.01); B23K 103/00 (2006.01); H01L 21/02 (2006.01); H10K 71/40 (2023.01)
CPC G02B 27/141 (2013.01) [B23K 26/352 (2015.10); B23K 26/704 (2015.10); B23K 26/705 (2015.10); B23K 2103/56 (2018.08); H01L 21/02686 (2013.01); H10K 71/421 (2023.02)] 20 Claims
OG exemplary drawing
 
1. An apparatus for manufacturing a display device, the apparatus comprising:
a chamber;
a laser module comprising a plurality of laser generators which respectively generates a plurality of raw laser beams using a solid material as a medium;
a beam coupling module which combines the plurality of raw laser beams into a plurality of coupling beams;
a beam mixing unit which converts the plurality of coupling beams into a plurality of mixing beams;
a micro smoother which induces vibration movements of the plurality of mixing beams;
an optical module which converts the plurality of mixing beams passed through the micro smoother into a final laser beam, and directs the final laser beam to the chamber; and
a seal box disposed between the optical module and the chamber.