US 12,405,478 B2
Apparatus for laser annealing and operating method thereof
Sangmin Lee, Yongin-si (KR); Seulgi Lee, Cheongju-si (KR); Sungwook Jung, Seoul (KR); Hyukjun Kwon, Uiwang-si (KR); and Hyangrok Lee, Anyang-si (KR)
Assigned to EO TECHNICS CO., LTD, Anyang-si (KR); and Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Jan. 21, 2022, as Appl. No. 17/580,708.
Claims priority of application No. 10-2021-0105958 (KR), filed on Aug. 11, 2021.
Prior Publication US 2023/0047722 A1, Feb. 16, 2023
Int. Cl. G02B 27/09 (2006.01); B23K 26/00 (2014.01); B23K 26/06 (2014.01); B23K 26/064 (2014.01); B23K 26/067 (2006.01); G02B 3/00 (2006.01); G02B 27/10 (2006.01); G02B 27/14 (2006.01); G02B 27/28 (2006.01); B23K 103/00 (2006.01); H01L 21/67 (2006.01)
CPC G02B 27/0905 (2013.01) [B23K 26/0006 (2013.01); B23K 26/009 (2013.01); B23K 26/0648 (2013.01); B23K 26/0652 (2013.01); B23K 26/0676 (2013.01); G02B 3/0062 (2013.01); G02B 27/0972 (2013.01); G02B 27/106 (2013.01); G02B 27/144 (2013.01); G02B 27/146 (2013.01); G02B 27/283 (2013.01); G02B 27/286 (2013.01); B23K 2103/56 (2018.08); H01L 21/67115 (2013.01)] 10 Claims
OG exemplary drawing
 
1. An apparatus for laser annealing comprising:
a light source configured to generate a plurality of laser beams;
a time division superimposing device comprising at least one beam splitter configured to temporally branch the plurality of laser beams, respectively, to propagate branched beams onto different optical paths, and wherein the time division superimposing device is configured to superimpose beams emitted from the same laser, from the branched beams propagated onto different optical paths;
a space split superimposing device comprising
at least one beam splitter configured to spatially branch superimposed beams from the time division superimposing device, respectively, and
at least one reflector configured to propagate beams emitted from different lasers onto the same path, to superimpose the propagated beams emitted from the plurality of lasers beams;
an optical illumination system comprising a plurality of lenses configured to form flat-top beams homogenizing intensities of superimposed beams from the space split superimposing device;
a mask configured to pass homogenized beams from the flat-top beams formed by passing through the optical illumination system; and
an optical imaging system comprising a plurality of lenses configured to image each of the homogenized beams passing through the mask onto a wafer.