US 12,405,413 B2
Optical interference filter
Jinhui Yang, Santa Rosa, CA (US); Marius Grigonis, Santa Rosa, CA (US); and Andrew Clark, Santa Rosa, CA (US)
Assigned to VIAVI Solutions Inc., Chandler, AZ (US)
Filed by VIAVI Solutions Inc., Chandler, AZ (US)
Filed on Aug. 23, 2022, as Appl. No. 17/821,606.
Prior Publication US 2024/0069262 A1, Feb. 29, 2024
Int. Cl. G02B 5/28 (2006.01); G02B 5/20 (2006.01)
CPC G02B 5/286 (2013.01) [G02B 5/207 (2013.01); G02B 5/288 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical interference filter, comprising:
a substrate; and
a plurality of sets of layers that are disposed on the substrate, wherein each set of layers includes:
a first layer that comprises aluminum nitride;
a second layer that comprises at least silicon and oxygen; and
a third layer that comprises at least hydrogen and silicon, wherein:
the third layer does not comprise aluminum nitride,
the second layer is disposed between the first layer and the third layer, and
the first layer, of a first set of layers of the plurality of sets of layers, is disposed directly on a surface of the substrate.