CPC G01T 1/2018 (2013.01) [C09K 11/06 (2013.01); C09K 11/665 (2013.01); H10F 39/1898 (2025.01); C09K 2211/10 (2013.01)] | 20 Claims |
1. A scintillator comprising:
a substrate;
a plurality of cavities; and
a semiconductor at least partially filling each cavity, wherein:
each cavity is defined by the substrate and at least three sidewalls comprising a photoresist, with each sidewall positioned substantially perpendicular to the substrate,
each sidewall is at least partially covered by a side reflector, and
the substrate is substantially transparent.
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