| CPC G01T 1/2018 (2013.01) [C09K 11/06 (2013.01); C09K 11/665 (2013.01); H10F 39/1898 (2025.01); C09K 2211/10 (2013.01)] | 20 Claims | 

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               1. A scintillator comprising: 
            a substrate; 
                a plurality of cavities; and 
                a semiconductor at least partially filling each cavity, wherein: 
                each cavity is defined by the substrate and at least three sidewalls comprising a photoresist, with each sidewall positioned substantially perpendicular to the substrate, 
                each sidewall is at least partially covered by a side reflector, and 
                the substrate is substantially transparent. 
               |