US 12,405,390 B2
Control apparatus, system, method, and program
Takuto Sakumura, Tokyo (JP); Yasukazu Nakaye, Tokyo (JP); Tetsuya Ozawa, Tokyo (JP); and Kazuyuki Matsushita, Tokyo (JP)
Assigned to Rigaku Corporation, Tokyo (JP)
Appl. No. 17/794,774
Filed by Rigaku Corporation, Tokyo (JP)
PCT Filed Dec. 22, 2020, PCT No. PCT/JP2020/048018
§ 371(c)(1), (2) Date Jul. 22, 2022,
PCT Pub. No. WO2021/153107, PCT Pub. Date Aug. 5, 2021.
Claims priority of application No. 2020-011214 (JP), filed on Jan. 27, 2020.
Prior Publication US 2023/0115151 A1, Apr. 13, 2023
Int. Cl. G01T 1/17 (2006.01); G01T 1/24 (2006.01)
CPC G01T 1/17 (2013.01) [G01T 1/247 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An X-ray measurement system comprising:
an X-ray measurement apparatus having an X-ray detector; and
a control apparatus for controlling the X-ray detector and outputting a measurement result, wherein
the control apparatus comprising or configured to set an energy range of X-rays to be detected for each unit region of the X-ray detector, the X-ray detector being capable of setting only a single energy range for each unit area, acquire a count value of the set energy, range for each unit region as measurement data by a result of the X-ray measurement, and output the measurement data,
the process or s a pair of upper and lower limits of different energy ranges for respective unit regions in at least two or more unit regions, and
the processor performs at least one of the zero point shift and gain change of a signal input by X-ray detection for each unit region with respect to a global threshold constant in all the regions to set the energy range.