US 12,405,359 B2
Target measurement device and method for measuring a target
Pradip Girdhar Chaudhari, Hsinchu (TW); Che-Hui Lee, Taipei (TW); Chih-Cheng Wei, Hsinchu (TW); Wen-Cheng Yang, Hsinchu (TW); and Chyi-Tsong Ni, Hsin-Chu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed on Jul. 27, 2023, as Appl. No. 18/359,868.
Application 18/359,868 is a continuation of application No. 16/906,939, filed on Jun. 19, 2020, granted, now 11,754,691.
Claims priority of provisional application 62/907,521, filed on Sep. 27, 2019.
Prior Publication US 2023/0375684 A1, Nov. 23, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01C 3/08 (2006.01); G01S 7/481 (2006.01); G01S 7/497 (2006.01); G01S 17/06 (2006.01)
CPC G01S 7/4972 (2013.01) [G01S 7/4812 (2013.01); G01S 17/06 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A target measurement device, comprising:
a fixing ring having a first surface, wherein the fixing ring comprises:
a zeroing hole at the first surface; and
a plurality of mounting holes at the first surface and adjacent to the zeroing hole; and
a transceiver disposed over the first surface of the fixing ring, wherein the transceiver is at least movable between a center of the fixing ring to an edge of the fixing ring from a top view perspective.