US 12,405,289 B2
Device and method for operating a bending beam in a closed control loop
Christof Baur, Darmstadt (DE); and Florian Demski, Mühltal (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Mar. 26, 2024, as Appl. No. 18/616,453.
Application 18/616,453 is a continuation of application No. 18/128,690, filed on Mar. 30, 2023, granted, now 11,965,910.
Application 18/128,690 is a continuation of application No. 17/400,349, filed on Aug. 12, 2021, granted, now 11,630,124, issued on Apr. 18, 2023.
Claims priority of application No. 102020210290.2 (DE), filed on Aug. 13, 2020.
Prior Publication US 2024/0230709 A1, Jul. 11, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01Q 30/04 (2010.01); G01Q 10/06 (2010.01)
CPC G01Q 30/04 (2013.01) [G01Q 10/065 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An apparatus for operating at least one bending beam in at least one closed control loop, the apparatus comprising:
a. at least one first interface designed to receive at least one controlled variable of the at least one control loop;
b. at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth that is greater than the bit depth of the controlled variable, the programmable logic circuit further being designed to switch over between at least one first operating mode and at least one second operating mode of the at least one bending beam; and
c. at least one second interface designed to provide a manipulated variable of the at least one control loop.