US 12,405,232 B2
X-ray inspection apparatus used for an inspection of a substrate, X-ray inspection system, image management method and program
Hironori Kasahara, Kyoto (JP)
Assigned to OMRON CORPORATION, Kyoto (JP)
Filed by OMRON Corporation, Kyoto (JP)
Filed on Oct. 17, 2022, as Appl. No. 17/967,079.
Claims priority of application No. 2021-177957 (JP), filed on Oct. 29, 2021.
Prior Publication US 2023/0046611 A1, Feb. 16, 2023
Int. Cl. G01N 23/046 (2018.01); A61B 6/00 (2006.01); F04C 15/06 (2006.01); F04C 18/344 (2006.01); G03B 42/00 (2021.01); G06V 10/75 (2022.01)
CPC G01N 23/046 (2013.01) [A61B 6/44 (2013.01); A61B 6/4429 (2013.01); A61B 6/5205 (2013.01); F04C 15/064 (2013.01); F04C 18/3441 (2013.01); G03B 42/00 (2013.01); G06V 10/75 (2022.01); F04C 2210/206 (2013.01); F04C 2240/603 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An X-ray inspection apparatus used for an inspection of a substrate, the X-ray inspection apparatus comprising:
(i) at least one memory configured to store computer-executable instructions and at least one processor configured to execute the computer-executable instructions stored in the at least one memory, (ii) at least one integrated circuit, or both (i) and (ii) that implement:
an image acquisition unit that acquires a plurality of tomographic images for the substrate;
an image extraction unit that extracts, from a data set obtained based on the plurality of tomographic images, an inspection tomographic image that is a target for determining whether the substrate is acceptable or not; and
a saved data generation unit that generates predetermined saved data including at least the inspection tomographic image; and
a saved data storage device that stores the saved data,
wherein the saved data generation unit generates the saved data only for the substrate for which a result of the inspection indicates defective, and
the saved data storage device stores the saved data on a long-term basis.