US 12,405,228 B2
Inspection apparatus and inspection method
Tomonori Nakamura, Hamamatsu (JP); and Kenichiro Ikemura, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed on May 15, 2024, as Appl. No. 18/664,848.
Application 18/664,848 is a continuation of application No. 17/772,282, granted, now 12,013,349, previously published as PCT/JP2020/040255, filed on Oct. 27, 2020.
Claims priority of application No. 2020-005830 (JP), filed on Jan. 17, 2020.
Prior Publication US 2024/0302292 A1, Sep. 12, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01N 21/956 (2006.01); G01B 11/27 (2006.01); G01N 21/64 (2006.01)
CPC G01N 21/956 (2013.01) [G01B 11/272 (2013.01); G01N 21/64 (2013.01); G01N 2021/95638 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An inspection apparatus inspecting an object comprising a substrate bearing a plurality of light-emitting elements, the inspection apparatus comprising:
a light source unit configured to generate excitation light emitted on a light-emitting element;
a light detection unit configured to detect emitted light from the light-emitting element exposed to the excitation light;
an input unit configured to receive information on an emission color of the light-emitting element;
a control unit configured to determine a wavelength of the excitation light, based on the information on the emission color received by the input unit, the control unit controlling the light source unit so that the light source unit generates the excitation light with the determined wavelength; and
a plurality of first band-pass filters configured to transmit beams of emitted light with different wavelength bands, wherein
the control unit switches one of the first band-pass filters disposed in an optical path leading from the light-emitting element to the light detection unit, according to a determined wavelength of the excitation light, and
the control unit determines a wavelength of within a range of from 365 nm to 490 nm to be the wavelength of the excitation light.