US 12,405,227 B2
Method for region of interest processing for reticle particle detection
Peter Conrad Kochersperger, Easton, CT (US); Christopher Michael Dohan, Redding, CT (US); Justin Lloyd Kreuzer, Trumbull, CT (US); Michal Emanuel Pawlowski, Norwalk, CT (US); Aage Bendiksen, Fairfield, CT (US); Kirill Urievich Sobolev, Brookfield, CT (US); James Hamilton Walsh, Newtown, CT (US); Roberto B. Wiener, Ridgefield, CT (US); and Arun Mahadevan Venkataraman, Wilton, CT (US)
Assigned to ASML Holding N.V., Veldhoven (NL)
Appl. No. 17/794,905
Filed by ASML Holding N.V., Veldhoven (NL)
PCT Filed Jan. 21, 2021, PCT No. PCT/EP2021/051365
§ 371(c)(1), (2) Date Jul. 22, 2022,
PCT Pub. No. WO2021/148550, PCT Pub. Date Jul. 29, 2021.
Claims priority of provisional application 63/036,744, filed on Jun. 9, 2020.
Claims priority of provisional application 62/964,924, filed on Jan. 23, 2020.
Prior Publication US 2023/0055116 A1, Feb. 23, 2023
Int. Cl. G01N 21/956 (2006.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01); G03F 7/00 (2006.01)
CPC G01N 21/956 (2013.01) [G01N 21/8806 (2013.01); G01N 21/9501 (2013.01); G03F 7/7065 (2013.01); G01N 2021/95676 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An inspection system comprising:
a radiation source configured to generate a beam of radiation and configured to:
irradiate a first surface of an object, a first parameter of the beam defining a region of the first surface of the object, and
irradiate a second surface of the object, a second parameter of the beam defining a region of the second surface, wherein the second surface is at a different depth level within the object than the first surface;
a detector configured to:
define a field of view (FOV) of the first surface including the region of the first surface, and
receive radiation scattered from the region of the first surface and the region of the second surface; and
processing circuitry configured to:
discard image data not received from the region of the first surface, and
construct a composite image comprising the image data from across the region of the first surface.