US 12,405,210 B1
System for, and calibration and testing of directed beam ellipsometer systems
Ping He, Lincoln, NE (US); Martin M. Liphardt, Lincoln, NE (US); and Galen L. Pfeiffer, Roca, NE (US)
Assigned to J.A. WOOLLAM CO., INC., Lincoln, NE (US)
Filed by J.A. WOOLLAM CO., INC., Lincoln, NE (US)
Filed on Dec. 8, 2023, as Appl. No. 18/445,644.
Application 18/445,644 is a continuation of application No. 17/300,687, filed on Sep. 30, 2021, granted, now 12,332,163.
Claims priority of provisional application 63/258,750, filed on May 24, 2021.
This patent is subject to a terminal disclaimer.
Int. Cl. G01N 21/21 (2006.01)
CPC G01N 21/211 (2013.01) [G01N 2201/066 (2013.01); G01N 2201/12746 (2013.01)] 4 Claims
OG exemplary drawing
 
1. An ellipsometer system comprising a source of a beam of electromagnetic radiation, a polarization state generator, a stage for supporting a sample, a polarization state analyzer and a detector of electromagnetic radiation;
said ellipsometer system further comprising a beam directing system selected from a group consisting of:
a) two total internal reflection beam directing prisms, one before and one after a sample placed on said stage for supporting a sample;
b) two beam folding optics systems, each comprising four flat mirrors, one before and one after a sample placed on said stage for supporting a sample;
c) two double prism systems one before and one after a sample placed on said stage for supporting a sample;
d) two beam focusing optics systems, each comprising two flat and mirrors, a convex mirror and a concave mirror, one before and one after a sample placed on said stage for supporting a sample;
such that in use a beam of electromagnetic radiation provided by said source thereof passes through said a polarization state generator, said polarization state analyzer and enters said detector of electromagnetic radiation, said beam further interacting with a sample placed on said stage for supporting a sample, and said selected beam directing system, both before and after said sample.