US 12,405,202 B2
Semiconductor device for particle measurement and method for operating the semiconductor device
Klaus Elian, Alteglofsheim (DE); Ludwig Heitzer, Falkenfels (DE); Fabian Merbeler, Munich (DE); Matthias Eberl, Taufkirchen (DE); Thomas Müller, Lappersdorf (DE); Andreas Allmeier, Pfatter (DE); Derek Debie, Bogen (DE); Cyrus Ghahremani, Regensburg (DE); Jens Pohl, Bernhardswald (DE); and Christian Irrgang, Sinzing (DE)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on Apr. 17, 2023, as Appl. No. 18/301,469.
Claims priority of application No. 102022110093.6 (DE), filed on Apr. 26, 2022.
Prior Publication US 2023/0341311 A1, Oct. 26, 2023
Int. Cl. G01N 15/06 (2024.01); G01N 15/00 (2006.01); G01H 13/00 (2006.01); G01N 15/02 (2006.01)
CPC G01N 15/0656 (2013.01) [G01N 15/00 (2013.01); G01N 15/0606 (2013.01); G01H 13/00 (2013.01); G01N 2015/0046 (2013.01); G01N 15/02 (2013.01); G01N 15/0266 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A semiconductor device for measuring particles having a cavity housing and a micro-electromechanical system (MEMS) chip arranged inside a cavity formed by the cavity housing,
wherein the cavity housing includes a first opening, via which the cavity is connected to a surroundings and in which a first grating is arranged, wherein the first grating is capable, by setting the first grating to a first electrical potential, of one or more of attracting particles from the surroundings or electrically charging the particles from the surroundings,
wherein the MEMS chip includes a membrane facing toward the first opening, wherein the membrane is configured to, by setting the membrane to a second electrical potential of attracting the particles from the surroundings.