US 12,405,162 B2
Spectroscopic unit and spectroscopic module
Kei Tabata, Hamamatsu (JP); and Yumi Kuramoto, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 17/631,941
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Sep. 24, 2020, PCT No. PCT/JP2020/036020
§ 371(c)(1), (2) Date Feb. 1, 2022,
PCT Pub. No. WO2021/065668, PCT Pub. Date Apr. 8, 2021.
Claims priority of application No. 2019-183873 (JP), filed on Oct. 4, 2019.
Prior Publication US 2024/0035888 A1, Feb. 1, 2024
Int. Cl. G01J 3/26 (2006.01); G01J 3/02 (2006.01); G01J 3/12 (2006.01)
CPC G01J 3/26 (2013.01) [G01J 3/0262 (2013.01); G01J 3/0291 (2013.01); G01J 2003/1213 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A spectroscopic unit comprising:
a Fabry-Perot interference filter including a first mirror part and a second mirror part in which a distance therebetween is variable;
a housing including a wall part that extends along a direction intersecting a facing direction of the first mirror part and the second mirror part, the wall part formed with an opening facing the Fabry-Perot interference filter in the facing direction of the first mirror part and the second mirror part, wherein the opening is a through hole penetrating the wall part and the opening is a light passage, the housing accommodating the Fabry-Perot interference filter;
a first aperture part provided on a side opposite to the Fabry-Perot interference filter with respect to the wall part and formed with a first aperture facing the opening in the facing direction; and
a second aperture part provided on a side opposite to the wall part with respect to the first aperture part and formed with a second aperture facing the first aperture in the facing direction, wherein
a length of the second aperture in the facing direction is larger than a length of the first aperture in the facing direction,
an outer edge of the first aperture is positioned inside each of an outer edge of the opening and an outer edge of the second aperture when viewed from the facing direction, and
the first aperture includes at least one of a first tapered portion reaching a first surface of the first aperture part on the wall part side and extending toward the first surface, and a second tapered portion reaching a second surface of the first aperture part on the second aperture part side and extending toward the second surface.