US 12,404,850 B2
Method for producing a micropump with mechanically biased diaphragm actuator
Siegfried Röhl, Munich (DE); Yuecel Congar, Munich (DE); Martin Wackerle, Munich (DE); Martin Richter, Munich (DE); and Christoph Kutter, Munich (DE)
Assigned to Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Munich (DE)
Filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Munich (DE)
Filed on Nov. 13, 2020, as Appl. No. 17/097,826.
Application 17/097,826 is a continuation of application No. PCT/EP2019/062199, filed on May 13, 2019.
Claims priority of application No. 10 2018 207 858.0 (DE), filed on May 18, 2018.
Prior Publication US 2021/0060553 A1, Mar. 4, 2021
Int. Cl. B23P 15/00 (2006.01); B01L 3/00 (2006.01); B29C 65/48 (2006.01); F04B 43/04 (2006.01)
CPC F04B 43/046 (2013.01) [B01L 3/502707 (2013.01); B01L 3/50273 (2013.01); B23P 15/00 (2013.01); B29C 65/4835 (2013.01); B01L 2200/12 (2013.01); Y10T 29/49236 (2015.01)] 10 Claims
OG exemplary drawing
 
1. A method for producing a micropump, the method comprising:
providing a substrate comprising at least one pump diaphragm for the micropump,
providing a piezo diaphragm actuator for actuating the pump diaphragm by deflecting the pump diaphragm,
temporarily arranging, during the production of the micropump, the piezo diaphragm actuator in a holding device,
aligning the holding device relative to the substrate such that the piezo diaphragm actuator is arranged opposite to the pump diaphragm,
temporarily applying, during the production of the micropump, a fluid pressure that is higher than an ambient pressure so as to move the pump diaphragm towards the piezo diaphragm actuator, such that the pump diaphragm comes into contact with the piezo diaphragm actuator, until both the pump diaphragm and the piezo diaphragm actuator exhibit a dome-shaped deformation facing a same direction, and
adhering the deformed piezo diaphragm actuator to the deformed pump diaphragm.