US 12,404,849 B2
Micromembrane pumping device
Agnes Bussmann, Munich (DE); Lorenz Gruenerbel, Munich (DE); Christian Wald, Munich (DE); and Sebastian Kibler, Munich (DE)
Assigned to Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V., Munich (DE)
Filed by Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V., Munich (DE)
Filed on Dec. 16, 2022, as Appl. No. 18/067,370.
Application 18/067,370 is a continuation of application No. PCT/EP2020/066821, filed on Jun. 17, 2020.
Prior Publication US 2023/0121697 A1, Apr. 20, 2023
Int. Cl. F04B 43/04 (2006.01)
CPC F04B 43/043 (2013.01) [F04B 43/046 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A micromembrane pumping device for pumping a fluid, comprising:
a pump chamber to which an inlet valve for introducing the fluid into the pump chamber, an outlet valve for discharging the fluid from the pump chamber, and a membrane device for varying a volume of the pump chamber are associated, wherein the membrane device comprises a plate-shaped actuator for deforming the membrane device; and
an influencer for influencing the plate-shaped actuator so as to influence the volume of the pump chamber;
wherein the membrane device comprises a plate-shaped membrane body limiting the pump chamber;
wherein the plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber;
wherein the plate-shaped actuator is mounted to the plate-shaped membrane body by means of an electrically insulating glue layer so that the plate-shaped actuator is electrically insulated from the membrane body;
wherein at least one embedded portion of a support body at which or in which a deformation sensor for detecting a deformation of the membrane device is arranged, is arranged within the electrically insulating glue layer in order to detect the volume of the pump chamber;
wherein the influencer, the plate-shaped actuator and the deformation sensor form a closed-loop control circuit for regulating a ratio between a change in volume of the pump chamber during an operating cycle of the micromembrane pumping device and a duration of the operating cycle of the micromembrane pumping device; and
wherein the embedded portion of the support body, when viewed in a direction from the plate-shaped actuator towards the plate-shaped membrane body, comprises an area which is smaller than an area of the plate-shaped membrane body facing the embedded portion of the support body, and which is smaller than an area of the plate-shaped actuator facing the embedded portion of the support body.