US 12,404,602 B2
Apparatus for synchronous growth of silicon carbide crystals in multiple independent crucibles arranged linearly
Jianming Chen, Suzhou (CN); Yuanhui Zhou, Suzhou (CN); and Hongyu Yang, Suzhou (CN)
Assigned to SUZHOU UKING SEMICONDUCTOR TECHNOLOGY Co., Ltd., Suzhou (CN)
Filed by SUZHOU UKING PHOTOELECTRIC TECHNOLOGY CO., LTD., Suzhou (CN)
Filed on Jan. 19, 2023, as Appl. No. 18/156,885.
Application 18/156,885 is a continuation of application No. PCT/CN2022/124446, filed on Oct. 10, 2022.
Claims priority of application No. 202111349816.1 (CN), filed on Nov. 15, 2021.
Prior Publication US 2023/0151511 A1, May 18, 2023
Int. Cl. C30B 35/00 (2006.01); C30B 23/00 (2006.01); C30B 23/02 (2006.01); C30B 23/06 (2006.01); C30B 29/36 (2006.01)
CPC C30B 23/002 (2013.01) [C30B 23/025 (2013.01); C30B 23/066 (2013.01); C30B 29/36 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An apparatus for synchronous growth of silicon carbide crystals in multiple crucibles comprises a chamber and an insulation layer assembly arranged close to inner walls of the chamber,
wherein a plurality of heater components are arranged at intervals inside the insulation layer assembly, by which the chamber is divided into a plurality of independent growth cavities that are linearly arranged, and each of the growth cavities is provided with an independent growth assembly,
wherein the independent growth assembly comprises a graphite crucible and a seed crystal tray arranged on a top of the graphite crucible, and
wherein:
the graphite crucible is connected with a drive assembly at a bottom of the graphite crucible, and the drive assembly is used to drive the graphite crucible to move in its growth cavity;
the drive assembly comprises a lifting mechanism and a rotating mechanism;
the lifting mechanism comprises a hollow lifting rod connected to the bottom of the graphite crucible in a sliding way and a lifting motor fixed at a bottom of the chamber and connected with a bottom end of the hollow lifting rod; and
the rotating mechanism comprises a stepping motor fixed inside the hollow lifting rod and a rotating rod coaxially and fixedly connected with an output shaft of the stepping motor, with the rotating rod being fixedly connected with the bottom of the graphite crucible.