	US 12,404,585 B2
	Lithium precursors for deposition of lithium-containing layers, islets or clusters
Christian Dussarrat, Yokosuka (JP); Keishi Yamamoto, Yokosuka (JP); Nicolas Blasco, Paris (FR); and Sunao Kamimura, Tsukuba (JP)
Assigned to L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Paris (FR)
Appl. No. 17/767,771
Filed by L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Paris (FR)
PCT Filed Oct. 8, 2020, PCT No. PCT/US2020/054720 § 371(c)(1), (2) Date Apr. 8, 2022, PCT Pub. No. WO2021/072036, PCT Pub. Date Apr. 15, 2021.
Claims priority of provisional application 62/915,263, filed on Oct. 15, 2019.
Claims priority of provisional application 62/912,458, filed on Oct. 8, 2019.
Prior Publication US 2024/0102161 A1, Mar. 28, 2024
Int. Cl. C23C 16/455 (2006.01); C07F 1/02 (2006.01); C23C 16/30 (2006.01); H01M 4/131 (2010.01); H01M 4/58 (2010.01)

CPC C23C 16/45553 (2013.01) [C07F 1/02 (2013.01); C23C 16/30 (2013.01); C23C 16/45531 (2013.01); C23C 16/45555 (2013.01); H01M 4/131 (2013.01); H01M 4/5825 (2013.01)]

12 Claims

1. A method for forming a Li-containing film, islet or cluster on a substrate, the method comprising the steps of:

introducing a silicon-free lithium precursor having a general formula

[Li—NL¹L²-D_x]_y (I)

into a reactor containing the substrate disposed therein, wherein

L¹is a C₁-C₁₆linear or branched chains, or of the form (C_mH_n)-ER¹R²or (C_mH_n)-E′R¹, wherein

C_mH_nis an alkyl chain and may be linear or branched groups;

E represents B, N;

E′ represents a divalent element selected from O, S;

m is an integer which value is 1 or an integer ranging from 1 to 8;

n is an independent integer ranging from 2 to 16;

R¹is independent and selected from the group consisting of hydrogen, linear or branched groups, or linear or branched or substituted by other atoms or groups;

R²is independent and selected from the group consisting of hydrogen, linear or branched groups, or linear or branched groups substituted by other atoms or groups;

L²is of the form (C_pH_q)-ER³R⁴or (C_pH_q)-E′R³, wherein

C_pH_qis an alkyl chain and may be linear or branched groups;

E represents B, N;

E′ represents a divalent element selected from O, S;

p and q are independent integers ranging from 1 to 16;

R³and R⁴are independent and selected from the group consisting of hydrogen, linear or branched alkyl groups, or linear or branched groups substituted by other atoms or groups;

D is independently selected from monodentate, bidentate, tridentate, or polydentate neutral coordinating ligand system;

x is an integer comprised between 0 and 4; and

y represents the degree of association of the molecule and is comprised between 1 and 6; and

depositing at least part of the silicon-free lithium precursor onto the substrate to form the Li-containing film, islet or cluster using a vapor deposition method.