US 12,404,579 B2
Deposition apparatus and deposition method
Jae Sik Kim, Yongin-si (KR); Woo Yong Sung, Yongin-si (KR); Seung Ho Yoon, Yongin-si (KR); Hyoung Sub Lee, Yongin-si (KR); and Hye Min Lee, Yongin-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Nov. 16, 2023, as Appl. No. 18/511,964.
Claims priority of application No. 10-2023-0016196 (KR), filed on Feb. 7, 2023.
Prior Publication US 2024/0263295 A1, Aug. 8, 2024
Int. Cl. C23C 14/24 (2006.01); B41J 2/145 (2006.01); B41J 3/407 (2006.01); B41M 5/00 (2006.01); C23C 14/12 (2006.01)
CPC C23C 14/24 (2013.01) [B41J 2/145 (2013.01); B41J 3/407 (2013.01); B41M 5/0047 (2013.01); C23C 14/12 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A deposition apparatus comprising:
a chamber;
a deposition source disposed in the chamber;
a rotating plate disposed in the chamber, wherein an inkjet head is fixed to the rotating plate to allow a nozzle plate of the inkjet head to be vertically aligned with the deposition source; and
a first driving unit disposed in the chamber, wherein the first driving unit rotates the rotating plate about a vertical axis.