	US 12,404,215 B2
	Ceramic susceptor and manufacturing method thereof
Yun Ho Kim, Gimpo-si (KR); Joo Hwan Kim, Gimpo-si (KR); Hwan Young Park, Gimpo-si (KR); Bo Sung Kim, Gimpo-si (KR); and Hyun Taek Lee, Gimpo-si (KR)
Assigned to KSM COMPONENT CO., LTD., Gimpo-si (KR)
Filed by KSM COMPONENT CO., LTD., Gimpo-si (KR)
Filed on Sep. 18, 2024, as Appl. No. 18/888,637.
Claims priority of application No. 10-2023-0143623 (KR), filed on Oct. 25, 2023.
Prior Publication US 2025/0136515 A1, May 1, 2025
Int. Cl. C04B 35/103 (2006.01); C04B 35/638 (2006.01); C04B 35/64 (2006.01); H01L 21/687 (2006.01)

CPC C04B 35/103 (2013.01) [C04B 35/638 (2013.01); C04B 35/64 (2013.01); H01L 21/68757 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3865 (2013.01); C04B 2235/425 (2013.01); C04B 2235/602 (2013.01)]

10 Claims

1. A ceramic susceptor which comprises alumina (Al₂O₃); and

aluminum nitride (AlN), and which does not comprise a secondary phase including an aluminum oxynitride phase (AlON phase),

wherein a content of the alumina is in excess of 68% by weight and less than 95% by weight, and a content of the aluminum nitride is in excess of 5% by weight and less than 32% by weight,

wherein the ceramic susceptor has a volumetric resistance rate of 1.0E+10 to 1.0E+13 Ω·cm at 500° C. and a thermal conductivity of 30 to 60 W/m·k or more at room temperature, and

wherein the ceramic susceptor further comprises yttria (Y₂O₃) in an amount of 0.05 to 0.5 parts by weight, based on a total weight of 100 parts by weight of the alumina and the aluminum nitride.