US 12,404,169 B2
Large-scale plasmonic hybrid framework with built-in nanohole arrays as multifunctional optical sensing platforms
Haiyan Wang, West Lafayette, IN (US); Xuejing Wang, Los Alamos, NM (US); and Xinghang Zhang, West Lafayette, IN (US)
Assigned to Purdue Research Foundation, West Lafayette, IN (US)
Appl. No. 17/791,980
Filed by Purdue Research Foundation, West Lafayette, IN (US)
PCT Filed Feb. 4, 2021, PCT No. PCT/US2021/016657
§ 371(c)(1), (2) Date Jul. 11, 2022,
PCT Pub. No. WO2021/158816, PCT Pub. Date Aug. 12, 2021.
Claims priority of provisional application 62/970,948, filed on Feb. 6, 2020.
Prior Publication US 2023/0047636 A1, Feb. 16, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. B81C 1/00 (2006.01)
CPC B81C 1/00087 (2013.01) [B81B 2207/056 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A nanohole template, comprising:
a solid substrate;
a vertically aligned nanocomposite (VAN) structure disposed over the substrate, the VAN structure is made from a transition metal-nitrides having circular periodic nanoholes of about 2 nm to about 20 nm in diameter, wherein the nanoholes are filled with a fluid, wherein the solid substrate and the VAN structure are made of dissimilar materials,
wherein the solid substrate material is selected from the group consisting of Si, SiO2, MgO, SrTiO3, LaALO3, glass, and combinations thereof, and
wherein the VAN structure material is selected from the group consisting of TiN, TaN, ZrN, HfN, and combinations thereof.