| CPC B41J 2/14201 (2013.01) [B41J 2/1607 (2013.01); B41J 2/1623 (2013.01); B41J 2002/14419 (2013.01)] | 20 Claims |
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1. A inkjet printhead, comprising:
a first layer comprising an inlet formed to penetrate a substrate and introduce ink therein, and a plurality of membranes;
a second layer disposed beneath the first layer, and comprising a manifold formed to penetrate a substrate or to be recessed on a top of the substrate to communicate with the inlet, and a plurality of nozzle channels formed to penetrate the substrate below the membrane and allow the ink transferred from the manifold to flow therein;
a third layer disposed beneath the second layer, and comprising a plurality of nozzles formed in a substrate and communicating the plurality of nozzle channels;
a piezoelectric actuator formed on the first layer formed with the membrane, and comprising a lower first electrode, a piezoelectric body on the first electrode, and a second electrode on the piezoelectric body;
a first voltage controller configured to oscillate the membrane by applying a pulse voltage to the first electrode and the second electrode;
a third electrode disposed beneath the third layer, formed around each nozzle, and surrounded with an insulator;
a second voltage controller configured to discharge droplets of the ink based on induced electric force by applying voltage to the third electrode;
a fifth electrode disposed between the first layer and the second layer and surrounded with an insulating layer; and
a fourth voltage controller configured to apply voltage to the fifth electrode.
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