US 12,403,547 B2
Method for controlling stress in a substrate during laser deposition
Kurt Hein Vergeer, Waalre (NL); Jeroen Aaldert Heuver, Enschede (NL); Willem Cornelis Lambert Hopman, Deventer (NL); Kristiaan Hendrikus Aloysius Böhm, Deventer (NL); Jan Matthijn Dekkers, Aadorp (NL); and Jan Arnaud Janssens, Schalkhaar (NL)
Assigned to LAM RESEARH CORPORATION, Fremont, CA (US)
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
Filed on May 27, 2021, as Appl. No. 17/331,735.
Claims priority of application No. 20177146 (EP), filed on May 28, 2020.
Prior Publication US 2021/0370435 A1, Dec. 2, 2021
Int. Cl. B23K 26/00 (2014.01); B23K 26/03 (2006.01); B23K 26/035 (2014.01); B23K 26/14 (2014.01); B23K 101/36 (2006.01); B81C 1/00 (2006.01); C23C 14/22 (2006.01); H01L 21/02 (2006.01); H03H 3/02 (2006.01)
CPC B23K 26/0006 (2013.01) [B23K 26/034 (2013.01); B23K 26/035 (2015.10); B23K 26/1436 (2015.10); C23C 14/228 (2013.01); B23K 2101/36 (2018.08); B81C 1/00365 (2013.01); H01L 21/02104 (2013.01); H03H 2003/028 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for performing a laser deposition process, the method comprising:
defining a plurality of discrete surface portions on a substrate in a chamber of a deposition device, the deposition device being configured to direct a laser beam through a window of the chamber onto a target spot at a target positioned in the chamber to generate a plasma plume of target material to form a thin film of target material on the substrate;
aligning the target spot with a first discrete surface portion of the plurality of discrete surface portions and generating the plasma plume to deposit target material on the first discrete surface portion of the plurality of discrete surface portions; and
for each additional discrete surface portion of one or more additional discrete surface portions on the substrate, aligning the target spot with the additional discrete surface portion and adjusting at least one parameter of a plurality of parameters of the laser deposition process depending on the additional discrete surface portion of the plurality of discrete surface portions with which the target spot is aligned to deposit the target material on the additional discrete surface portion, such that, by adjusting the at least one parameter during the laser deposition process, a specific deposition pattern is obtained over a surface of the substrate to control a uniformity of stress of the thin film across the substrate and thereby control a bending of the substrate from stress,
the plurality of parameters comprising temperature, pressure, laser beam pulse duration, laser beam power, distance of target to substrate, spotsize and RF ionization energy.