US 12,403,497 B2
Apparatus and method for manufacturing high-density in-line carbon nanotube thin film
Jie Han, Beijing (CN); and Hui Wang, Beijing (CN)
Assigned to BEIJING HUA TAN YUAN XIN ELECTRONICS TECHNOLOGY CO., LTD, Beijing (CN)
Appl. No. 17/640,224
Filed by BEIJING HUA TAN YUAN XIN ELECTRONICS TECHNOLOGY CO., LTD, Beijing (CN); and BEIJING INSTITUTE OF CARBON-BASED INTEGRATED CIRCUIT, Beijing (CN)
PCT Filed Sep. 4, 2020, PCT No. PCT/CN2020/113382
§ 371(c)(1), (2) Date Mar. 3, 2022,
PCT Pub. No. WO2021/043236, PCT Pub. Date Mar. 11, 2021.
Claims priority of application No. 201910831548.3 (CN), filed on Sep. 4, 2019; application No. 201910831550.0 (CN), filed on Sep. 4, 2019; application No. 201910831824.6 (CN), filed on Sep. 4, 2019; and application No. 201910831831.6 (CN), filed on Sep. 4, 2019.
Prior Publication US 2022/0314265 A1, Oct. 6, 2022
Int. Cl. B32B 9/00 (2006.01); B05C 3/02 (2006.01); B05D 1/18 (2006.01); B05D 7/24 (2006.01); C01B 32/159 (2017.01); C01B 32/168 (2017.01); C01B 32/17 (2017.01); C01B 32/174 (2017.01); H10K 85/20 (2023.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); G03F 7/039 (2006.01); H10K 71/13 (2023.01)
CPC B05C 3/02 (2013.01) [B05D 1/18 (2013.01); B05D 7/24 (2013.01); C01B 32/159 (2017.08); C01B 32/168 (2017.08); C01B 32/17 (2017.08); C01B 32/174 (2017.08); H10K 85/221 (2023.02); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01B 2202/02 (2013.01); C01B 2202/04 (2013.01); C01B 2202/06 (2013.01); C01B 2202/08 (2013.01); G03F 7/039 (2013.01); H10K 71/13 (2023.02); Y10T 428/30 (2015.01)] 7 Claims
OG exemplary drawing
 
1. A method for forming an aligned carbon nanotube film, comprising:
adding a carbon nanotube solution into a container main body, wherein:
the container main body comprises a buffer partition plate that divides the container main body into an upper portion and a lower portion, wherein:
peripheral edges of the buffer partition plate are connected with an inner wall of the container main body; and
the buffer partition plate comprises a protruding strip-shaped fixing member and a plurality of through holes;
placing a substrate into the upper portion of the container main body vertically;
adding a sealing liquid that is immiscible with the carbon nanotube solution along the substrate or the side wall of the container main body to form two-liquid layers in the upper portion of the container main body;
ensuring, by using the buffer partition plate, the carbon nanotube solution passing through smoothly and uniformly from the upper portion of container main body to the lower portion of container main body;
leading a solvent out through a solvent lead-out part so that a liquid level of the carbon nanotube solution gradually drops to form the aligned carbon nanotube film on the substrate, wherein:
the solvent lead-out part communicates with an interior of the lower portion of the container main body through a through hole in a side wall of the container main body and extends to an outside of the container main body;
the solvent lead-out part comprises a pipeline having a semi-permeable effect; and
a dropping speed of the liquid level of the carbon nanotube solution is controlled by adjusting a length of the solvent lead-out part; and
cleaning the carbon nanotube film formed on the substrate.