US 12,403,433 B2
Dilute chemical solution production device
Wataru Sugita, Tokyo (JP); and Yuichi Ogawa, Tokyo (JP)
Assigned to KURITA WATER INDUSTRIES LTD., Tokyo (JP)
Appl. No. 17/436,653
Filed by KURITA WATER INDUSTRIES LTD., Tokyo (JP)
PCT Filed Feb. 18, 2020, PCT No. PCT/JP2020/006171
§ 371(c)(1), (2) Date Sep. 6, 2021,
PCT Pub. No. WO2020/195341, PCT Pub. Date Oct. 1, 2020.
Claims priority of application No. 2019-063574 (JP), filed on Mar. 28, 2019.
Prior Publication US 2022/0184571 A1, Jun. 16, 2022
Int. Cl. B01F 35/22 (2022.01); B01F 23/40 (2022.01); B01F 25/00 (2022.01); B01F 35/21 (2022.01); B01F 35/71 (2022.01); B01F 101/58 (2022.01); C11D 7/04 (2006.01); H01L 21/67 (2006.01)
CPC B01F 35/2202 (2022.01) [B01F 23/49 (2022.01); B01F 25/00 (2022.01); B01F 35/2133 (2022.01); B01F 35/717613 (2022.01); C11D 7/04 (2013.01); H01L 21/67051 (2013.01); B01F 2101/58 (2022.01); C11D 2111/22 (2024.01)] 7 Claims
OG exemplary drawing
 
1. A dilute chemical solution production device that produces a dilute chemical solution of a second liquid by adding the second liquid to a first liquid, the dilute chemical solution production device comprising:
a first pipe that flows the first liquid;
an undiluted solution tank that stores the second liquid;
a second pipe that connects the undiluted solution tank and the first pipe;
a pump that adds the second liquid into the first pipe through the second pipe;
a conductivity measuring meter provided on a downstream side of a connection site between the first pipe and the second pipe with respect to a flow direction of the first liquid; and
a controller that controls the pump based on a measured value of the conductivity measuring meter,
wherein the first pipe is provided with a first bent portion and a second bent portion, the first bent portion is disposed in a vicinity of the connection site with the second pipe, and the second bent portion is disposed between the first bent portion and the conductivity meter, and
a distance between the first bent portion and the second bent portion is 20 to 50 cm.