CPC H05H 7/22 (2013.01) [H01J 37/32082 (2013.01); H01J 41/14 (2013.01); H05B 31/26 (2013.01); H05H 1/46 (2013.01); H05H 1/54 (2013.01); H05H 3/06 (2013.01); H05H 5/04 (2013.01); H05H 6/00 (2013.01); H05H 9/02 (2013.01); H01J 37/08 (2013.01); H01J 41/04 (2013.01); H01T 23/00 (2013.01); H05H 1/4622 (2021.05)] | 15 Claims |
1. A method comprising:
producing an ion beam using a high energy ion beam generator device, wherein the high energy ion beam generator device comprises an extraction power supply and a high voltage power supply;
detecting, using a plurality of sensors positioned on the high energy ion beam generator device, a measurement indicative of an interaction between a region of the high energy ion beam generator device and the ion beam;
generating, using control software communicatively coupled to the plurality of sensors, an alert or alarm in response to the measurement; and
triggering an automated recovery sequence in response to the alert or alarm, wherein:
the automated recovery sequence returns the high energy ion beam generator device to normal operation without user intervention; and
the automated recovery sequence comprises disabling the extraction power supply, clearing a fault condition generated in response to the measurement, resetting the high voltage power supply, and enabling the extraction power supply.
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