| CPC H05B 45/40 (2020.01) [G01R 31/2875 (2013.01); H05B 45/12 (2020.01)] | 9 Claims |
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1. A control method of an inspection apparatus including
a stage on which a substrate having an inspection object to be inspected is mounted and
a plurality of light sources configured to emit light to heat the substrate,
wherein the control method comprises:
individually lighting the plurality of light sources and obtaining a plurality of first temperature distributions of the substrate;
obtaining a second temperature distribution representing a sum of the plurality of first temperature distributions;
obtaining one or more correction values for correcting an amount of light output from at least one or more light sources of the plurality of light sources based on the second temperature distribution; and
correcting the amount of light output from each of the at least one or more light sources using the one or more correction values,
wherein the obtaining of the plurality of first temperature distributions includes obtaining first thermal images by imaging the substrate with a thermal image obtaining section, and
wherein the sum of the plurality of first temperature distributions is calculated based on the first thermal images.
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