US 12,074,585 B2
Torsional mode quartz crystal device
Yue Fang, Brea, CA (US); and Jian Feng Chen, Fords, NJ (US)
Assigned to Statek Corporation, Orange, CA (US)
Filed by Statek Corporation, Orange, CA (US)
Filed on May 17, 2023, as Appl. No. 18/319,319.
Application 18/319,319 is a continuation of application No. 17/305,904, filed on Jul. 16, 2021, granted, now 11,658,637.
Application 17/305,904 is a continuation of application No. 16/999,579, filed on Aug. 21, 2020, granted, now 11,070,192, issued on Jul. 20, 2021.
Application 16/999,579 is a continuation in part of application No. 16/548,675, filed on Aug. 22, 2019, granted, now 11,070,191, issued on Jul. 20, 2021.
Prior Publication US 2024/0137006 A1, Apr. 25, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/215 (2006.01); G01K 7/32 (2006.01); H03H 9/02 (2006.01); H03H 9/05 (2006.01); H03H 9/10 (2006.01); H03H 9/13 (2006.01)
CPC H03H 9/215 (2013.01) [G01K 7/32 (2013.01); H03H 9/02023 (2013.01); H03H 9/0547 (2013.01); H03H 9/0595 (2013.01); H03H 9/10 (2013.01); H03H 9/13 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A quartz crystal device configured for temperature sensing, comprising:
a quartz crystal comprising first and second elongate arms laterally extending from a base region in a horizontal lengthwise direction of the arms, wherein each arm has formed on each of upper and lower sides thereof a pair of vertically recessed groove structures laterally elongated in the horizontal lengthwise direction; and
a first electrode and a second electrode formed on the upper and lower sides of each of the first and second elongate arms and configured to be biased at opposite polarities, wherein adjacent ones of the groove structures on a same side of each of the first and second elongate arms have formed therein different ones of the first and second electrodes.