CPC H03H 9/215 (2013.01) [G01K 7/32 (2013.01); H03H 9/02023 (2013.01); H03H 9/0547 (2013.01); H03H 9/0595 (2013.01); H03H 9/10 (2013.01); H03H 9/13 (2013.01)] | 25 Claims |
1. A quartz crystal device configured for temperature sensing, comprising:
a quartz crystal comprising first and second elongate arms laterally extending from a base region in a horizontal lengthwise direction of the arms, wherein each arm has formed on each of upper and lower sides thereof a pair of vertically recessed groove structures laterally elongated in the horizontal lengthwise direction; and
a first electrode and a second electrode formed on the upper and lower sides of each of the first and second elongate arms and configured to be biased at opposite polarities, wherein adjacent ones of the groove structures on a same side of each of the first and second elongate arms have formed therein different ones of the first and second electrodes.
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