US 12,074,540 B2
Method of controlling at least two interacting piezoelectric actuators
Koc Burhanettin, Ettlingen (DE)
Assigned to PHYSIK INSTRUMENTE (PI) GMBH & CO. KG, (DE)
Appl. No. 17/912,634
Filed by PHYSIK INSTRUMENTE (PI) GMBH & CO. KG, Karlsruhe (DE)
PCT Filed Mar. 12, 2021, PCT No. PCT/EP2021/056298
§ 371(c)(1), (2) Date Sep. 19, 2022,
PCT Pub. No. WO2021/190953, PCT Pub. Date Sep. 30, 2021.
Claims priority of application No. 20165674 (EP), filed on Mar. 25, 2020.
Prior Publication US 2023/0188057 A1, Jun. 15, 2023
Int. Cl. H02N 2/06 (2006.01); H02N 2/02 (2006.01)
CPC H02N 2/06 (2013.01) [H02N 2/067 (2013.01); H02N 2/02 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A method of controlling at least two interacting piezoelectric actuators for commonly displacing an object attached thereto, said method comprising:
a. Step A: applying a first cyclic drive voltage signal with a constant frequency to a first piezoelectric actuator,
b. Step B: applying a second cyclic drive voltage signal with a constant frequency to a second piezoelectric actuator, wherein the frequencies of the first and second cyclic drive voltage signals are substantially identical and wherein the frequencies of the first and second cyclic drive voltage signals are substantially oppositely phased, wherein
at least in a predetermined time period the cyclic drive voltage signals in step A and B are synchronized such that at least one time phase is comprised in which the drive voltage signals of the first and second piezoelectric actuators both have a gradient of decreasing or both have a gradient of increasing the respective drive voltage signal.