US 12,074,247 B2
Nanorod production method and nanorod produced thereby
Young Rag Do, Seoul (KR); and Yeon Goog Sung, Goyang-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed on Sep. 19, 2022, as Appl. No. 17/948,056.
Application 17/948,056 is a continuation of application No. 16/806,639, filed on Mar. 2, 2020, granted, now 11,450,737.
Application 16/806,639 is a continuation of application No. 16/077,316, granted, now 10,580,859, issued on Mar. 3, 2020, previously published as PCT/KR2017/002053, filed on Feb. 24, 2017.
Claims priority of application No. 10-2016-0024610 (KR), filed on Feb. 29, 2016.
Prior Publication US 2023/0056417 A1, Feb. 23, 2023
Int. Cl. H01L 33/00 (2010.01); B82Y 40/00 (2011.01); H01L 21/02 (2006.01); H01L 21/20 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01); H01L 21/3063 (2006.01); H01L 21/762 (2006.01); H01L 29/06 (2006.01); H01L 29/41 (2006.01)
CPC H01L 33/005 (2013.01) [B82Y 40/00 (2013.01); H01L 21/02 (2013.01); H01L 21/2007 (2013.01); H01L 21/304 (2013.01); H01L 21/306 (2013.01); H01L 21/3063 (2013.01); H01L 21/76251 (2013.01); H01L 29/06 (2013.01); H01L 29/0669 (2013.01); H01L 29/41 (2013.01); H01L 21/02543 (2013.01); H01L 21/0262 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A method of manufacturing a rod, the method comprising:
providing a growth substrate and a support substrate;
epitaxial growing a material layer on one surface of the growth substrate;
forming a sacrificial layer on one surface of the support substrate;
bonding an upper surface of the material layer to an upper surface of the sacrificial layer;
separating the growth substrate from the material layer;
forming a rod by vertically etching the material layer to the upper surface of the sacrificial layer; and
separating the rod by removing the sacrificial layer.