US 12,074,235 B2
Seeded solid-phase crystallization of transparent conducting vanadate perovskites
Paul Gregory Evans, Madison, WI (US); Thomas Francis Kuech, Madison, WI (US); Donald E. Savage, Madison, WI (US); Yajin Chen, Madison, WI (US); and Samuel Marks, Madison, WI (US)
Assigned to Wisconsin Alumni Research Foundation, Madison, WI (US)
Filed by Wisconsin Alumni Research Foundation, Madison, WI (US)
Filed on Sep. 9, 2020, as Appl. No. 17/015,428.
Claims priority of provisional application 62/898,692, filed on Sep. 11, 2019.
Prior Publication US 2021/0069999 A1, Mar. 11, 2021
Int. Cl. B32B 9/00 (2006.01); C01G 31/02 (2006.01); C23C 14/08 (2006.01); C23C 14/35 (2006.01); C23C 14/58 (2006.01); C30B 28/02 (2006.01); H01L 31/0232 (2014.01); H01L 31/08 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); C30B 29/30 (2006.01)
CPC H01L 31/0232 (2013.01) [C01G 31/02 (2013.01); C23C 14/088 (2013.01); C23C 14/35 (2013.01); C23C 14/5806 (2013.01); C30B 28/02 (2013.01); H01L 31/085 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01P 2002/34 (2013.01); C30B 29/30 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method of forming a polycrystalline vanadate perovskite film, the method comprising:
forming a plurality of nanoscale crystalline perovskite oxide seeds on a substrate;
depositing a layer of amorphous vanadate perovskite precursor over the nanoscale crystalline perovskite oxide seeds; and
heating the layer of amorphous vanadate perovskite precursor, whereby the layer of amorphous vanadate perovskite precursor is laterally crystallized from the nanoscale crystalline perovskite oxide seeds to form the polycrystalline vanadate perovskite film.