CPC H01L 31/022441 (2013.01) [H01L 31/02008 (2013.01); H01L 31/0682 (2013.01); H01L 31/0745 (2013.01); Y02E 10/547 (2013.01); Y02P 70/50 (2015.11)] | 13 Claims |
1. A solar cell, comprising:
a first tunnel dielectric layer on a silicon substrate;
an emitter region on the first tunnel dielectric layer;
a second tunnel dielectric layer on the emitter region; and
a conductive contact on the second tunnel dielectric layer, the conductive contact comprising a metal and silicon, and the conductive contact having a lateral width the same as a lateral width of the second tunnel dielectric layer.
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