CPC H01L 29/735 (2013.01) [H01L 29/0808 (2013.01); H01L 29/0821 (2013.01); H01L 29/1008 (2013.01)] | 20 Claims |
1. A structure comprising:
an emitter in a semiconductor substrate;
a collector in the semiconductor substrate;
a base contact region in the semiconductor substrate and adjacent to the collector and the emitter, wherein the collector and the emitter are between the base contact region; and
a shallow trench isolation structure overlapping the base contact region and further separating the base contact region from the emitter and the collector.
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