US 12,074,051 B2
Teaching apparatus and substrate alignment apparatus using the same
Taehyoung Lee, Suwon-si (KR); Hohyun Lee, Hwaseong-si (KR); Jongmin Song, Seoul (KR); Young Yoon, Hwaseong-si (KR); and Jaemoo Choi, Suwon-si (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Apr. 5, 2022, as Appl. No. 17/713,541.
Claims priority of application No. 10-2021-0114082 (KR), filed on Aug. 27, 2021.
Prior Publication US 2023/0064941 A1, Mar. 2, 2023
Int. Cl. H01L 21/683 (2006.01); B25J 9/16 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/6833 (2013.01) [B25J 9/1679 (2013.01); B25J 9/1697 (2013.01); H01L 21/67259 (2013.01); H01L 21/67742 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A teaching apparatus comprising:
a chamber;
an electrostatic chuck in the chamber, the electrostatic chuck including a sidewall surrounding a loading area;
an aligner configured to be loaded onto the loading area of the electrostatic chuck;
a vision sensor configured to obtain measurement data by measuring separation distances of separation regions between the aligner and the sidewall of the electrostatic chuck and to transmit the measurement data;
a transfer robot configured to load the aligner onto a reference position of the loading area and to position the vision sensor above the electrostatic chuck; and
a controller configured to reset the reference position and to equalize the separation distances based on the measurement data transmitted from the vision sensor.