US 12,074,050 B2
Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for producing composite sintered body
Nobuhiro Hidaka, Tokyo (JP); and Naoto Kimura, Tokyo (JP)
Assigned to SUMITOMO OSAKA CEMENT CO., LTD., Tokyo (JP)
Appl. No. 16/497,743
Filed by SUMITOMO OSAKA CEMENT CO., LTD., Tokyo (JP)
PCT Filed Mar. 26, 2018, PCT No. PCT/JP2018/012039
§ 371(c)(1), (2) Date Sep. 25, 2019,
PCT Pub. No. WO2018/181130, PCT Pub. Date Oct. 4, 2018.
Claims priority of application No. 2017-068710 (JP), filed on Mar. 30, 2017.
Prior Publication US 2020/0027770 A1, Jan. 23, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. C04B 35/645 (2006.01); C04B 35/117 (2006.01); C04B 35/626 (2006.01); C04B 35/628 (2006.01); H01J 37/32 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/6833 (2013.01) [C04B 35/117 (2013.01); C04B 35/62625 (2013.01); C04B 35/62635 (2013.01); C04B 35/628 (2013.01); C04B 35/645 (2013.01); H01J 37/32715 (2013.01); C04B 35/62655 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3826 (2013.01); C04B 2235/656 (2013.01); C04B 2235/786 (2013.01); C04B 2235/80 (2013.01); C04B 2235/87 (2013.01); C04B 2235/9669 (2013.01); H01J 37/32642 (2013.01); H01J 2237/2007 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A composite sintered body which is a ceramic composite sintered body, comprising:
a metal oxide which is a main phase; and
silicon carbide which is a sub-phase,
wherein crystal grains of the silicon carbide are dispersed in crystal grains of the metal oxide and at crystal grain boundaries of the metal oxide, and
a proportion of the crystal grains of the silicon carbide dispersed in the crystal grains of the metal oxide is 25% or more in an area ratio with respect to a total crystal grains of the silicon carbide.