CPC H01L 21/681 (2013.01) [B25J 19/021 (2013.01); B65G 47/90 (2013.01); H01L 21/67259 (2013.01); H01L 21/68707 (2013.01)] | 14 Claims |
1. A substrate processing apparatus, comprising:
a substrate processing unit that holds and processes a substrate;
a substrate transfer unit that has a rotational axis and carries the substrate in the substrate processing unit;
a first sensor that detects a position of the substrate transfer unit relative to the substrate processing unit in a direction of travel thereof under a condition the substrate is carried in the substrate processing unit in the direction of travel;
a second sensor that detects a position of the substrate transfer unit relative to the substrate processing unit in a direction that is perpendicular to the direction of travel; and
a third sensor that detects an inclination of the rotational axis of the substrate transfer unit relative to the substrate processing unit.
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