US 12,074,043 B2
Transfer device and teaching method of robot arm
Takami Fukasawa, Yamanashi (JP); and Ryosuke Kanamaru, Yamanashi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed on Sep. 20, 2021, as Appl. No. 17/479,842.
Claims priority of application No. 2020-158203 (JP), filed on Sep. 23, 2020.
Prior Publication US 2022/0093432 A1, Mar. 24, 2022
Int. Cl. H01L 21/67 (2006.01); B25J 9/16 (2006.01); B25J 13/08 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67259 (2013.01) [B25J 9/1664 (2013.01); B25J 13/089 (2013.01); H01L 21/68707 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A transfer device for transferring a substrate, the transfer device comprising:
a robot arm having an arm for transferring the substrate and a motor for rotating the arm;
a first light irradiator configured to irradiate light along a first optical path;
a first light receiving sensor configured to receive the light irradiated from the first light irradiator; and
a control device configured to control the motor so that the arm is rotated across the first optical path,
wherein the control device performs
a) a process of detecting a first rotation angle of the arm when a state in which the first optical path is not blocked by the arm is changed to a state in which the first optical path is blocked by the arm on the basis of whether the light irradiated from the first light irradiator is received by the first light receiving sensor,
b) a process of detecting a second rotation angle of the arm when the state in which the first optical path is blocked by the arm is changed to the state in which the first optical path is not blocked by the arm on the basis of whether the light irradiated from the first light irradiator is received by the first light receiving sensor, and
c) a process of specifying a position of a first rotation axis of the arm on the basis of a width of a portion of the arm passing through the first optical path, a position of a first intersection of the first optical path and the arm when the first optical path is blocked by the arm, the first rotation angle, and the second rotation angle.