US 12,074,041 B2
Wet bench structure
Chung-Yu Lin, Hsinchu (TW); Shih-Chi Kuo, Yangmei (TW); and Chun-Chieh Mo, Kaohsiung (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on May 15, 2019, as Appl. No. 16/413,275.
Claims priority of provisional application 62/692,237, filed on Jun. 29, 2018.
Prior Publication US 2020/0006093 A1, Jan. 2, 2020
Int. Cl. H01L 21/67 (2006.01); H01L 21/02 (2006.01); H01L 21/673 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67057 (2013.01) [H01L 21/02052 (2013.01); H01L 21/67086 (2013.01); H01L 21/6733 (2013.01); H01L 21/68742 (2013.01); H01L 21/68764 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus for processing a plurality of objects, comprising:
a carrier configured to hold the plurality of objects, wherein the carrier comprises one or more lifting portions;
a tank configured to hold a processing agent and to receive the carrier; and
a first sub-roller attached to a first frame and a second sub-roller attached to a second frame positioned over the plurality of objects and configured to simultaneously spin the plurality of objects to disturb a flow field of the processing agent, wherein:
the first sub-roller is configured to spin a first object of the plurality of objects at a first speed, and
the second sub-roller is configured to spin a second object of the plurality of objects at a second speed different from the first speed; and
a control device programmed to simultaneously rotate the first sub-roller at the first speed and the second sub-roller at the second speed.