US 12,074,039 B2
Chiller make-break connector for substrate processing systems
Alexander Charles Marcacci, Union City, CA (US)
Assigned to LAM RESEARCH CORPORATION, Fremont, CA (US)
Appl. No. 17/908,060
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Feb. 25, 2021, PCT No. PCT/US2021/019566
§ 371(c)(1), (2) Date Aug. 30, 2022,
PCT Pub. No. WO2021/178192, PCT Pub. Date Sep. 10, 2021.
Claims priority of provisional application 62/984,081, filed on Mar. 2, 2020.
Prior Publication US 2023/0116577 A1, Apr. 13, 2023
Int. Cl. H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67017 (2013.01) [H01L 21/67772 (2013.01); H01L 21/67775 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A substrate processing system comprising:
a hinge assembly configured to allow a substrate support and an RF bias assembly of a processing chamber to slide, from a docked position to an undocked position, relative to other components of the processing chamber; and
a make-break connector configured to supply fluid to at least one of the substrate support and the RF bias assembly and including:
a first portion including a first fluid passage connected to a first conduit;
a second portion including a second fluid passage connected to a second conduit,
wherein the first fluid passage in the first portion fluidly communicates with the second fluid passage in the second portion; and
a fastener removably connecting the first portion to the second portion,
wherein the first portion is configured to slide with the substrate support and the RF bias assembly relative to the second portion and the other portions of the processing chamber, and
wherein the first portion is located inwardly from the second portion relative to a direction of sliding from the docked position to the undocked position.