| CPC H01J 37/32568 (2013.01) [H01J 37/32348 (2013.01); H01J 37/3244 (2013.01); H01J 37/32449 (2013.01); H01J 37/32522 (2013.01); H01J 2237/002 (2013.01); H01J 2237/038 (2013.01)] | 5 Claims |
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1. An active gas generation apparatus generating active gas obtained by activating material gas supplied to a discharge space, comprising:
a first electrode constituting part; and
a second electrode constituting part provided on a lower side of said first electrode constituting part, wherein
said first electrode constituting part includes a first electrode dielectric film and a first metal electrode formed on an upper surface of said first electrode dielectric film, said second electrode constituting part includes a second electrode dielectric film and a second metal electrode formed on a lower surface of said second electrode dielectric film, AC voltage is applied to said first metal electrode, said second metal electrode is set to ground potential, and a dielectric space where said first and second electrode dielectric films face each other includes a region where said first and second metal electrodes overlap with each other in a plan view as said discharge space,
said second electrode dielectric film includes a gas ejection hole for ejecting said active gas to a lower side of said active gas generation apparatus,
said active gas generation apparatus further comprising
a base flange having conductivity, having a cross-section structure with a concave shape, and including a central bottom surface region and a peripheral protruding part provided along an outer periphery of said central bottom surface region to protrude in a height direction, wherein said second electrode constituting part is provided so that said second metal electrode has contact with said central bottom surface region,
said active gas generation apparatus further comprising:
a cooling plate provided on the peripheral protruding part of the base flange and located above an upper side of said first electrode constituting part without contact with said first electrode constituting part;
an insulating material provided between said cooling plate and said first electrode constituting part, having an upper surface having contact with a lower surface of said cooling plate, and having a lower surface having contact with the upper surface of said first metal electrode;
an electrode support member provided on the lower surface of said cooling plate to support said first electrode constituting part from a lower side of said first electrode constituting part; and
a metal housing provided on said peripheral protruding part of said base flange and having an in-housing space housing said cooling plate, wherein
said base flange includes:
a gas supply port receiving said material gas from outside said active gas generation apparatus;
a gas transmission path for supplying said material gas to said discharge space;
a cooling medium supply port receiving a cooling medium from outside said active gas generation apparatus;
a cooling medium transmission hole for supplying said cooling medium to said cooling plate; and
a base flange gas ejection hole for ejecting said active gas ejected from said gas ejection hole to said lower side of said active gas generation apparatus;
ground potential is supplied to said base flange,
said cooling plate includes
a cooling medium path transmitting said cooling medium supplied through said cooling medium transmission hole to an inner portion of said cooling plate, and
a gas separation structure of separating a gas flow between said in-housing space and said discharge space by said cooling plate is provided based on said cooling plate, said electrode support member, and said first electrode constituting part.
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