US 12,074,011 B2
Apparatus for and method of manufacturing semiconductor device
Jiye Kim, Suwon-si (KR); In Cheol Song, Hwaseong-si (KR); Woongpil Jeon, Jeju-si (KR); Daihong Kim, Suwon-si (KR); Jaebeom Park, Yongin-si (KR); and Byungho Chun, Seongnam-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Jun. 24, 2021, as Appl. No. 17/356,998.
Claims priority of application No. 10-2020-0155349 (KR), filed on Nov. 19, 2020.
Prior Publication US 2022/0157566 A1, May 19, 2022
Int. Cl. H01J 37/32 (2006.01); C23C 16/505 (2006.01); H05K 9/00 (2006.01)
CPC H01J 37/32449 (2013.01) [C23C 16/505 (2013.01); H01J 37/32082 (2013.01); H05K 9/0081 (2013.01); H01J 2237/3321 (2013.01)] 10 Claims
OG exemplary drawing
 
1. An apparatus for manufacturing a semiconductor device, the apparatus comprising:
a chamber including a lower housing and an upper housing on the lower housing;
heater chucks in the lower housing;
shower heads on the heater chucks, the shower heads being between the lower housing and the upper housing;
power supplies connected to the shower heads, the power supplies to provide radio-frequency powers to the shower heads;
power straps in the upper housing, the power straps connecting the shower heads to the power supplies; and
shielding members in the upper housing, the shielding members enclosing the power straps and the shower heads, respectively, the shielding members to prevent electromagnetic interference of the radio-frequency powers between the power straps and between the shower heads,
wherein the shielding members are connected to each other by capacitors
wherein the capacitors comprise:
short range capacitors connected between the shielding members that are disposed in short range distance to remove or minimize a near field interference between the shielding members, and
long range capacitors connected between the shielding members that are disposed in long range distance longer than the short range distance to remove or minimize a far field interference between the shielding members.