US 12,074,010 B2
Atomic layer deposition part coating chamber
Michael R. Rice, Pleasanton, CA (US); Hanish Kumar Panavalappil Kumarankutty, Bangalore (IN); Steven D. Marcus, San Jose, CA (US); Kirubanandan Naina Shanmugam, Bangalore (IN); Sriharsha Dharmapura Sathyanarayanamurthy, Bengaluru (IN); Madhukar Krishna, Bengaluru (IN); Shivaprakash Padadayya Hiremath, Bangalore (IN); Senthil Kumar Nattamai Subramanian, Hosur (IN); and Sankar Menon Cherubala Pathayapura, Bangalore (IN)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 9, 2021, as Appl. No. 17/470,294.
Prior Publication US 2023/0074149 A1, Mar. 9, 2023
Int. Cl. H01J 37/32 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/46 (2006.01)
CPC H01J 37/3244 (2013.01) [C23C 16/45536 (2013.01); C23C 16/45544 (2013.01); C23C 16/4586 (2013.01); C23C 16/46 (2013.01); C23C 16/463 (2013.01); H01J 37/32357 (2013.01); H01J 37/32522 (2013.01); H01J 37/32724 (2013.01); C23C 16/4582 (2013.01)] 67 Claims
OG exemplary drawing
 
1. A part coating reactor, comprising:
a lower body and a lid assembly that together define and enclose an interior volume;
one or more heaters disposed in the lid assembly;
one or more coolant channels disposed in the lid assembly to flow a heat transfer medium therethrough;
a plurality of gas passages disposed through the lid assembly to facilitate providing one or more gases to the interior volume, wherein the plurality of gas passages include a plurality of fluidly independent plenums disposed in the lid assembly, and wherein each fluidly independent plenum includes a plurality of holes disposed along a bottom surface of the plenum and extending to a lower surface of the lid assembly to fluidly couple the plenum to the interior volume; and
one or more mounting brackets to facilitate coupling a workpiece to be coated to the lower surface of the lid assembly beneath the plurality of holes.