US 12,073,541 B2
Methods for high-performance electron microscopy
Zbyszek Otwinowski, Dallas, TX (US); Raquel Bromberg, Dallas, TX (US); and Dominika Borek, Dallas, TX (US)
Assigned to THE BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM, Austin, TX (US)
Appl. No. 17/633,133
Filed by THE BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM, Austin, TX (US)
PCT Filed Aug. 10, 2020, PCT No. PCT/US2020/045673
§ 371(c)(1), (2) Date Feb. 4, 2022,
PCT Pub. No. WO2021/030297, PCT Pub. Date Feb. 18, 2021.
Claims priority of provisional application 62/885,154, filed on Aug. 9, 2019.
Prior Publication US 2022/0277427 A1, Sep. 1, 2022
Int. Cl. G06T 5/80 (2024.01); H01J 37/22 (2006.01)
CPC G06T 5/80 (2024.01) [H01J 37/222 (2013.01); G06T 2207/10061 (2013.01); H01J 2237/223 (2013.01); H01J 2237/2826 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method to correct one or more image aberrations in an electron microscopy image, the method comprising:
obtaining a plurality of electron microscope (EM) images of an internal reference grid sample, the plurality of EM images captured using an electron microscope in connection with a plurality of optical conditions including a plurality of coordinated beam-image shifts;
generating an EM micrograph by correcting the plurality of EM images for sample drift;
generating a deconvolved image by deconvolving a transformed image using one or more deconvolution coefficients, the transformed image generated by applying a transform to the EM micrograph;
generating a filtered deconvolved image by applying a filter to the deconvolved image;
generating an aberration-corrected EM micrograph by calculating an inverse transform of the filtered deconvolved image;
determining an intensity distribution for the aberration-corrected EM micrograph;
calculating a moment for the intensity distribution; and
performing an iterative optimization process using one or more deconvolution coefficients until an optimal one or more of the one or more deconvolution coefficients is determined based on maximization of the moment.