US 12,072,693 B2
Analysis device and analysis method
Koki Tanaka, Miyagi (JP); and Ryu Nagai, Miyagi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed on Mar. 5, 2021, as Appl. No. 17/193,026.
Claims priority of application No. 2020-044349 (JP), filed on Mar. 13, 2020; and application No. 2020-151905 (JP), filed on Sep. 10, 2020.
Prior Publication US 2021/0312610 A1, Oct. 7, 2021
Int. Cl. G06T 7/00 (2017.01); G05B 23/02 (2006.01); G06N 20/00 (2019.01)
CPC G05B 23/0221 (2013.01) [G06N 20/00 (2019.01); G06T 7/0008 (2013.01); G06T 2207/10036 (2013.01); G06T 2207/30148 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An analysis device, comprising:
a memory storing executable instructions; and
a processor coupled to the memory, the processor configured to execute the executable instructions to:
perform a machine learning using a time series data group measured during a first processing of an object in a processing space, and calculate a value indicating a relationship of time series data between respective measurement items in a corresponding time range during the first processing of the object, the time series data group being in association with a condition of the processing space; and
evaluate an unknown condition of the processing space during a second processing of the object based on the value indicating the relationship calculated by performing machine learning using the time series data group measured during the first processing of the object under a known condition of the processing space.