CPC G03F 7/70341 (2013.01) [G03F 7/707 (2013.01); G03F 7/70716 (2013.01); G03F 7/70733 (2013.01)] | 19 Claims |
1. A table apparatus for an immersion lithographic tool configured to supply and confine liquid between the table apparatus and a projection system configured to direct a beam of radiation at a substrate, the table apparatus comprising:
a support structure configured to support an object;
a shutter member having a top surface, wherein, in use, the top surface is substantially co-planar with a surface of the support structure; and
a fluid extraction system configured to extract liquid entering a gap between part of the table apparatus and part of another table, wherein the table apparatus is moveable relative to the another table or vice versa,
wherein the fluid extraction system comprises a plurality of extraction openings in or below the gap and in a sidewall surface of the shutter member or of the support structure, each extraction opening being an aperture of an extraction channel and each extraction channel is connected to a collector channel, the collector channel being common to at least two extraction channels, and the sidewall surface is at an oblique angle to the top surface such that the oblique angle sidewall surface has the extraction openings therein.
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