	US 12,072,627 B2
	Resist composition and patterning process
Teppei Adachi, Joetsu (JP); Shinya Yamashita, Joetsu (JP); Masaki Ohashi, Joetsu (JP); Tomohiro Kobayashi, Joetsu (JP); Kenichi Oikawa, Joetsu (JP); and Takayuki Fujiwara, Joetsu (JP)
Assigned to SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Filed by SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Filed on May 15, 2023, as Appl. No. 18/197,244.
Application 18/197,244 is a continuation of application No. 17/198,575, filed on Mar. 11, 2021, granted, now 11,693,314.
Application 17/198,575 is a continuation of application No. 17/082,175, filed on Oct. 28, 2020, granted, now 11,340,527, issued on May 24, 2022.
Claims priority of application No. 2019-202291 (JP), filed on Nov. 7, 2019.
Prior Publication US 2023/0280651 A1, Sep. 7, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G03F 7/004 (2006.01); C07C 381/12 (2006.01); C07D 307/93 (2006.01); C07D 327/04 (2006.01); C07D 493/18 (2006.01); C08F 220/18 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); G03F 7/11 (2006.01); G03F 7/20 (2006.01)

CPC G03F 7/0045 (2013.01) [C07C 381/12 (2013.01); C07D 307/93 (2013.01); C07D 327/04 (2013.01); C07D 493/18 (2013.01); C08F 220/1807 (2020.02); C08F 220/1808 (2020.02); G03F 7/0382 (2013.01); G03F 7/0397 (2013.01); G03F 7/11 (2013.01); G03F 7/2006 (2013.01); G03F 7/2041 (2013.01)]

12 Claims

1. A photo-acid generator comprising an onium salt shown by a general formula (B-1),

wherein W₁represents a cyclic divalent hydrocarbon group having 4 to 12 carbon atoms and containing a heteroatom; W₂represents a cyclic monovalent hydrocarbon group having 4 to 14 carbon atoms and not containing a heteroatom; Rf represents a divalent organic group shown by the above general formula; A₁and A₂each independently represent a hydrogen atom or a trifluoromethyl group; B₁and B₂each independently represent a hydrogen atom or a fluorine atom, provided that B₁and B₂do not simultaneously represent a hydrogen atom; * represents an attachment point for a carbonyloxy group; “m” represents an integer of 0 to 4; “n” represents 1; and M⁺ represents an onium cation that is at least one cation selected from the cations shown by the following formula group (b1) and formula group (b2):

(i) formula group (b1):

(ii) formula group (b2):