US 12,072,445 B2
Phased array LiDAR transmitting chip of multi-layer materials, manufacturing method thereof, and LiDAR device
Pengfei Wang, Beijing (CN); Yang Xu, Beijing (CN); Yejin Zhang, Beijing (CN); Hongyan Yu, Beijing (CN); Jiaoqing Pan, Beijing (CN); Qingfei Wang, Beijing (CN); and Linyan Tian, Beijing (CN)
Assigned to WUHAN VANJEE OPTOELECTRONIC TECHNOLOGY CO., LTD., Wuhan (CN)
Filed by VANJEE TECHNOLOGY CO., LTD., Beijing (CN)
Filed on Sep. 30, 2020, as Appl. No. 17/039,833.
Application 17/039,833 is a continuation of application No. PCT/CN2019/011239, filed on Oct. 22, 2019.
Claims priority of application No. 201811422332.3 (CN), filed on Nov. 27, 2018.
Prior Publication US 2021/0141063 A1, May 13, 2021
Int. Cl. G02F 1/29 (2006.01); G01S 7/481 (2006.01); G01S 7/484 (2006.01); G02B 6/12 (2006.01)
CPC G01S 7/4815 (2013.01) [G01S 7/4817 (2013.01); G01S 7/484 (2013.01); G02F 1/292 (2013.01); G02B 2006/12166 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A phased array light detection and ranging (LiDAR) transmitting chip of multi-layer materials, comprising: a first material structure layer and an SOI silicon waveguide structure layer, wherein an overlapping region of a rear end of the first material structure layer and a front end of the SOI silicon waveguide structure layer forms a coupling connection structure, and the first material structure layer comprises: an input coupler and a beam splitter;
the input coupler is optically connected to the beam splitter; and the beam splitter is optically connected to the SOI silicon waveguide structure layer through the coupling connection structure;
the input coupler is configured to couple input light to the chip;
the beam splitter is configured to split a light wave coupled to the chip;
the coupling connection structure is configured to couple each of split light waves to a corresponding silicon waveguide in the SOI silicon waveguide structure layer; and
a non-linear refractive index of a first material in the first material structure layer is lower than that of a silicon material.