US 12,072,350 B2
Suspension for a mems vibration sensor
Faisal Zaman, Naperville, IL (US); Shubham Shubham, Schaumburg, IL (US); and Ken Deng, Schaumburg, IL (US)
Assigned to Knowles Electronics, LLC, Itasca, IL (US)
Filed by Knowles Electronics, LLC, Itasca, IL (US)
Filed on Jun. 23, 2022, as Appl. No. 17/847,979.
Prior Publication US 2023/0417793 A1, Dec. 28, 2023
Int. Cl. G01P 15/125 (2006.01); G01P 1/00 (2006.01)
CPC G01P 15/125 (2013.01) [G01P 1/00 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A suspension for a microelectromechanical systems (MEMS) vibration sensor, the suspension comprising one or more anchor assemblies, each of the one or more anchor assemblies comprising:
an anchor body and one or more springs integrally extending from the anchor body;
wherein each of the one or more springs comprises:
a first section integrally extending from the anchor body, the first section including a first end proximate to the anchor body and a second end distal from the anchor body;
a second section and a third section, each of the second and third sections including a first lateral portion extending from the second end of the first section, a first leg that extends from the first lateral portion toward the anchor body, the first leg including a first end proximate to the first lateral portion and a second end distal from the first lateral portion, a second lateral portion that extends from the second end of the first leg away from the first section, and a second leg that extends from the second lateral portion away from the anchor body, the second leg including a first end proximate to the second lateral portion and a second end distal from the second lateral portion,
wherein the first lateral portions of the second and third sections extend in opposite lateral directions, and
wherein the second ends of the second legs extend farther from the anchor body than the first lateral portions; and
wherein the one or more anchor assemblies comprises a plurality of anchor assemblies, the suspension further comprising a proof mass connected to the second legs of each of the plurality of anchor assemblies, wherein the plurality of anchor assemblies are connected along a connection axis with each first section extending along the connection axis toward the first section of one of the each of the one or more springs.