US 12,072,318 B2
Chamber component cleanliness measurement system
Amir A. Yasseri, San Jose, CA (US); Duane Outka, Fremont, CA (US); Armen Avoyan, Oakland, CA (US); Kennet Cresencio Baylon, Pittsburg, CA (US); John Daugherty, Fremont, CA (US); Girish M. Hundi, Dublin, CA (US); and Cliff La Croix, Gardnerville, NV (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/612,381
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed May 19, 2020, PCT No. PCT/US2020/033578
§ 371(c)(1), (2) Date Nov. 18, 2021,
PCT Pub. No. WO2020/236803, PCT Pub. Date Nov. 26, 2020.
Claims priority of provisional application 62/852,185, filed on May 23, 2019.
Prior Publication US 2022/0252548 A1, Aug. 11, 2022
Int. Cl. G01N 29/14 (2006.01); B08B 3/12 (2006.01); G01N 1/02 (2006.01); G01N 29/02 (2006.01); H01J 37/32 (2006.01); G01N 1/00 (2006.01); G01N 1/40 (2006.01)
CPC G01N 29/14 (2013.01) [B08B 3/12 (2013.01); G01N 1/02 (2013.01); G01N 29/02 (2013.01); H01J 37/32788 (2013.01); G01N 2001/002 (2013.01); G01N 2001/4094 (2013.01)] 22 Claims
OG exemplary drawing
 
1. An apparatus for measuring contaminants on a surface of a component, comprising:
an extraction vessel for holding a measurement fluid, wherein the extraction vessel has an opening adapted to form a concave meniscus using the measurement fluid, wherein the opening is smaller than a side of the surface of the component;
an actuator for moving at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component, wherein the measurement fluid does not contact an entire side of the surface of the component;
a contaminant analyzer adapted to measure contaminants in the measurement fluid, wherein the measured contaminants are used to determine a level of cleanliness of the component; and
a transducer positioned to provide acoustic energy to the measurement fluid.