CPC G01N 23/20058 (2013.01) [G01N 2223/401 (2013.01)] | 27 Claims |
1. A method of performing serial electron crystallography, comprising:
scanning an electron nanobeam among a plurality of scan locations within a sample region, the sample region comprising a plurality of crystals, and employing a detector to detect, at each scan location, a signal associated with scattered electrons, thereby collecting an image dataset mapping the sample region;
processing the image dataset to identify crystals therein;
determining a set of scanning parameters suitable for scanning the electron nanobeam among a respective set of crystal locations corresponding to at least a subset of the crystals identified in the image dataset;
employing the set of scanning parameters to serially scan a collimated electron nanobeam among the respective set of crystal locations and employing a camera to collect at least one diffraction pattern at each of the crystal locations; and
processing electron diffraction patterns obtained from at least a subset of the crystal locations to calculate a crystal structure of the crystals.
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